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This Standard defines terms commonly used in the calibration of mass flow controllers (MFC) and mass flow meters (MFM)
SEMI MF673 should be referred to for measurements on silicon wafers and certain thin films fabricated on such substrates
SEMI G5-85 (technical revision)
If specific inlet challenge(s) and/or inlet measurements are required
F12100 - SEMI F121 - Guide for Evaluating Metrology for Particle Precursors in Ultrapure Water Revision:SEMI F121-0923 - Current This Standard defines terms commonlyThis Guide provides a performance based definition of metrology that can be used to measure particle precursors in ultrapure water (UPW). This Guide includes a testing methodology and criteria for qualifying measurement techniques for quantifying particle precursor concentrations in UPW. Particle precursors are defined as dissolved compounds that can form particles when dried on a wafer surface. This definition was developed by the UPW International
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